Method for calibrating a metrology tool and a system

摘要

A method for calibrating a metrology tool, the method includes: determining a relationship between an upper portion of a milled reference structural element and between a lower portion of the milled reference structural element; and defining a calibration parameter in response to the relationship. A metrology system that includes: a miller adapted to mill a reference structural element; and a measurement device adapted to determine a relationship between an upper portion of a milled reference structural element and between a lower portion of the milled reference structural element; wherein the metrology system is further adapted to define a calibration parameter in response to the relationship.