| 摘要 |
A method for manufacturing an LCD(Liquid Crystal Display) device is provided to secure the uniformity of a channel without an increase of a mask process and apply an additional pre-ashing process in forming source and drain electrodes, thereby improving the reduction of active tail and wavy noise. A method for manufacturing an LCD device comprises the following steps of: providing a first substrate divided into a pixel portion and a pad portion and a second substrate attached to the first substrate; laminating a gate insulating layer, a semiconductor layer(53), and a first conductive layer on the first substrate where a gate electrode is patterned; forming a first PR(Photoresist) pattern of which the thickness is thinly patterned in the channel area of a transistor by using a half tone mask; patterning the first conductive layer by using the first PR pattern; progressing a first ashing process for the first PR pattern to form a second PR pattern aligned with the outside of the first conductive layer; patterning the semiconductor layer by using the second PR pattern; forming source and drain electrodes by using the second PR pattern; forming a passivation layer(55) and a pixel electrode(56) on the first substrate; and forming a liquid crystal layer between the first substrate and the second substrate. |
