| 摘要 |
Apparatus for measuring the density of a plasma, comprising a probe (1) which can introduced into the plasma and has a probe head (2) in the form of a three-axis ellipsoid, and having a shaft (3) which is connected to the probe head (2), with the probe head (2) having a casing (4) and a probe core (5) which is surrounded by the casing (4), and with the surface (8) of the probe core (5) having areas (9, 10) of opposite polarity which are isolated from one another. The probe core (5) is composed of electrodes (6, 7) to which a signal is fed, in which case a resonant frequency and a plasma electron density which follows from the resonant frequency can be restricted by a multipole development to a mathematical model, which produces unambiguous evaluation specification. |
