| 摘要 |
A probe needle 20 includes a cantilever 21, a column 22 and a tip 23. The column 22 is cantilevered from an end of the cantilever 21. The tip 23 is formed on a top end of the column 22. The column 22 is formed so as to be longer than the tip 23. The heights of the column 22 and tip 23 are chosen so that their sum is twice or more than twice the width of the columnar 22.
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