GAS SENSOR USING CARBON NATOTUBES

摘要

A gas sensor using carbon nano-tubes is provided to increase recycling efficiency of the gas sensor by effectively and rapidly removing the gas absorbed into the carbon nano-tubes through via holes formed on a substrate. A gas sensor using carbon nano-tubes includes a substrate(110), electrodes(112a,112b), and a carbon nano-tube(120). A plurality of via holes(150) is vertically formed on the substrate in parallel with the electrodes. The electrodes are formed on the substrate between the via holes. The carbon nano-tube is formed to cover the electrodes and the via holes.