Method for manufacturing substrate for discrete track recording media and method for manufacturing discrete track recording media

摘要

According to one embodiment, a method for manufacturing a substrate for a discrete track recording media, the method includes forming an imprint resist layer on a substrate, imprinting, on the imprint resist layer, a stamper formed with patterns of protrusions and recesses corresponding to recording track zones and servo zones to transfer the patterns of protrusions and recesses to the imprint resist layer, removing the stamper from the imprint resist layer, and diffusing liquefied CO₂ in a process chamber set at a pressure of 2 to 5 atm, diffusing liquefied H₂O in the process chamber set at a pressure of 0.01 to 1 atm, or diffusing a reactive gas selected from a group consisting of liquefied CF₄, CHF₃, SF₆, and C₂F₆ in the process chamber set at an arbitrary pressure, to jet spray the liquefied gas onto a surface of the substrate.