| 摘要 |
PROBLEM TO BE SOLVED: To provide a motor driving device in which a switching frequency of a PWM method is set to be 50kHz or higher to provide a response speed required for a motor for driving a galvanometer mirror, and, for a motor for driving a stage used for manufacturing or an inspection device of a semiconductor and a liquid crystal with a lower loss than in a linear amplification method. SOLUTION: The motor driving device comprises a control circuit for controlling a current that flows in a drive coil 11 of a motor 10 for driving a galvanometer mirror. The control circuit comprises a PWM signal generating circuit 20 which generates a PWM signal whose basic frequency is 50 kHz to 1 MHz, and an output transistor element 22 for switching the drive of a current output according to the PWM signal. The pulse width of the PWM signal is controlled by the control signal inputted into the PWM signal generating circuit. COPYRIGHT: (C)2008,JPO&INPIT
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