Piezoelektrisches Bauelement und Herstellungsverfahren für ein piezoelektrisches Bauelement

摘要

A piezoelectric device is formed of a supporting substrate (12) with first (14) and second (16) conductive traces on a first surface (12a). A piezoelectric material layer (18) is laminated to the supporting substrate (12) with a first surface (18a) of the piezoelectric material layer (18) electrically connected to the second conductive trace (16) and a second surface (18b) of the piezoelectric material layer (18) electrically conducted to the first conductive trace (14). A protective coating (26) is applied over the piezoelectric material layer (18) so that at least a portion of the first (14) and second (16) conductive traces are exposed.