发明名称 WORKPIECE CARRIER, ITS MANUFACTURING METHOD, AND DOUBLE-SIDE GRINDING MACHINE
摘要 <P>PROBLEM TO BE SOLVED: To provide a workpiece carrier which surely performs an inversion work for preventing the workpiece carrier from warping, by an operator, and also to provide its management. <P>SOLUTION: The workpiece carrier 1 is for holding the workpiece upon grinding the workpiece by a double-side grinding machine, is equipped with a disk-shaped carrier body 2 having a plurality of holding holes 4 for holding the workpiece, and a marking part 6 installed in the carrier body 2 in order to visually discriminate the front and back of the carrier body 2, wherein the marking part 6 is installed at the center of the disk-shaped carrier and on the plate surface avoiding the holding holes 4. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007331035(A) 申请公布日期 2007.12.27
申请号 JP20060161972 申请日期 2006.06.12
申请人 EPSON TOYOCOM CORP 发明人 YUKI HIROAKI
分类号 B24B37/27;B24B37/28;H01L21/304 主分类号 B24B37/27
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