| 摘要 |
PROBLEM TO BE SOLVED: To change and correct a cross-section producing position in a short time by quickly and easily determining the state of advancement of cross-sectional processing and understand the inner structure of a sample in a cross-sectional sample producing appratus using ion beam and an intercepting material. SOLUTION: This cross-sectional sample producing apparatus includes an optical observing device 40 (cross section observing means) for observing the cross section of the sample 6 processed by the ion beam. While the ion beam is emitted or stopped to emit, a shutter 41 is opened, and the cross section of the sample 6 can be observed while maintaining a vacuum in a processing chamber 18. The cross-sectional sample producing apparatus further includes an adjusting means for changing the relative position of the sample 6 to the intercepting material 12. The capturing of cross-sectional images and the minute movement of the position of the cross section are repeated for each completion of cross sectional processing. From the provided images, the three-dimensional images of the sample 6 can be formed. COPYRIGHT: (C)2008,JPO&INPIT
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