发明名称 |
MATERIALVERDAMPFUNGSKAMMER MIT DIFFERENTIALVAKUUMPUMPE |
摘要 |
A material evaporation chamber comprises a vacuum chamber (10) and a first pumping unit (13). A wall (23) which can provide a total or partial seal divides the chamber into first (25) and second (22) volumes. Certain material sources (17) with a principal axis (18) are placed in the second volume which is pumped by a second pumping unit (24) and other material sources (21) are placed in the first volume. The wall incorporates apertures (26) centered on the principal axis and is provided with a means (27) for blocking or opening each aperture, controlled individually to protect the material sources having an unused principal axis. |
申请公布号 |
DE60317510(D1) |
申请公布日期 |
2007.12.27 |
申请号 |
DE2003617510 |
申请日期 |
2003.06.18 |
申请人 |
RIBER |
发明人 |
CHAIX, CATHERINE;JARRY, ALAIN BATIMENT C;NUTTE, PIERRE-ANDRE;LOCQUET, JEAN-PIERRE;FOMPEYRINE, JEAN;SIEGWART, HEINZ |
分类号 |
C23C14/24;H05B1/00;C23C14/00;C23C14/56;C30B23/02;C30B35/00 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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