发明名称 |
SAW device and manufacturing method |
摘要 |
<p>In a SAW device comprising a piezoelectric single crystal substrate and electrodes on a surface thereof, the substrate is obtained by slicing a LiTaO3 or LiNbO3 material such that a plane containing axis X and perpendicular to a new axis Y obtained by rotating axis Y about axis X by an angle of 33 DEG +/-9 DEG becomes the substrate surface, and each electrode is a layered film including a titanium nitride layer and an aluminum layer thereon. The aluminum layer containing no grain boundaries ensures high efficiency, long life SAW devices experiencing no increase of electrical resistance.</p> |
申请公布号 |
EP1296451(B1) |
申请公布日期 |
2007.12.26 |
申请号 |
EP20020256529 |
申请日期 |
2002.09.20 |
申请人 |
TDK CORPORATION |
发明人 |
NAKANO, MASAHIRO;OHTSUKA, SHIGEKI |
分类号 |
H03H3/08;H03H9/145;H03H9/02;H03H9/25 |
主分类号 |
H03H3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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