发明名称 Semiconductor test unit having low contact resistance with examined electronic products, semiconductor contact board, method for testing semiconductor device, semiconductor device, and method for manufacturing thereof
摘要 A semiconductor test unit comprises a test circuit for inputting/outputting a test signal to/from an examined electronic product, a test signal wiring electrically connected to the test circuit, a contact board electrically connected to an electrode of the examined electronic product and provided with an electrically conductive via to which the test signal is transmitted, a multilayer circuit board electrically connected to the conductive via and the test signal wiring, located under the bottom face of the contact board, and provided with at least one through-hole, and a vacuum attachment mechanism for attaching thereto and holding the examined electronic product, the contact board, and the multilayer circuit board by vacuum. The contact board is made of an insulative material, has top and bottom faces, and is provided with at least one through-hole.
申请公布号 US7312621(B2) 申请公布日期 2007.12.25
申请号 US20030401871 申请日期 2003.03.31
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 YAMAGUCHI NAOKO;SUGIZAKI YOSHIAKI;AOKI HIDEO;HIRAOKA TOSHIRO;HOTTA YASUYUKI;MATAKE SHIGERU;SAWANOBORI MISA
分类号 G01R31/02;G01R31/28 主分类号 G01R31/02
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