3D STRUCTURAL NANO DEVICES HAVING ZINC OXIDE TYPE NANO WIRES AND DEVICES USING IT

摘要

A nano device with a three-dimensional structure is provided to have a three dimensional structure of conductive thin film/zinc oxide-based nanowires/conductive thin film applicable to good photoelectronic devices and gas-detecting devices. A nano device with a three-dimensional structure includes: a first conductive thin film(1) formed on a substrate(4); many zinc oxide-based nanowires(3) which are grown on the first conductive thin film in a columnar form; and a second conductive thin film(2) which is formed on the ends of the nanowires so as to face the first conductive thin film. The many nanowires are connected in parallel between the first and second conductive thin films.