VIBRATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a vibration sensor capable of stably compensating for temperature characteristics of detection sensitivity.

SOLUTION: The vibration sensor comprises a vibrator (10); a drive circuit (20) for mechanically vibrating the vibrator; and a detection circuit (30) for making reference to a reference signal (S3) on a drive signal (S1) of the drive circuit (20) and detecting the physical conditions of the vibrator (10) on the basis of detection signal (S4) on mechanical vibrations of the vibrator (10). Temperature characteristics of the phase difference between the reference signal (S3) and the detection signal (S4) are set in such a way as to compensate for at least part of temperature characteristics of detection sensitivity of the detection signal (S4) to mechanical vibrations.

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