EVAPORATION SOURCE AND ORGANIC MATTER SPUTTERING APPARATUS WITH THE SAME

摘要

An evaporation source and an organism deposition apparatus having the same are provided to restrict a material agglomeration phenomenon by coating an insulating layer which is made of a metal material having a superior heat conductivity at the inner surface of a furnace. An evaporation source includes a furnace, an insulating layer and a heat source. The furnace(12) made of a nonmetal material is positioned at a lower portion of the inside of a deposition chamber. The insulating layer(16) which is made of the nonmetal material is coated at the inner surface of the furnace. The heat source heats the furnace.