| 摘要 |
PROBLEM TO BE SOLVED: To provide an appearance inspection apparatus and method which can perform accurate fault inspection in a short time. SOLUTION: A two-dimensional image of an object 3 to be inspected that is mounted on a stage 2 is photographed by a CCD camera 12. A control section 15 performs two-dimensional image processing on the photographed image to perform fault inspection. A part determined as a fault is subjected to redetermination as to whether it is a fault using its height information. COPYRIGHT: (C)2008,JPO&INPIT
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