发明名称 Clamping device for a wafer
摘要 <p>The device has a fixed clamping element and a movable clamping element, which is movable between an opening position and a closing position. A wafer is clamped between the fixed clamping element and the movable clamping element, if the movable clamping element is in the closing position. A spring element (365) is coupled with the movable clamping element. The movable clamping element is formed to bring the element in to a withdrawal position by using a stationary contact element (380) in the opening position with a movement of a supporting element (330). Independent claims are also included for the following: (1) a feeder device for uncovered elements (2) an assembly device for the automatic assembly of component support with component.</p>
申请公布号 EP1868238(A2) 申请公布日期 2007.12.19
申请号 EP20070109053 申请日期 2007.05.29
申请人 ASM ASSEMBLY SYSTEMS GMBH & CO. KG 发明人 PLATTNER, RUDOLF
分类号 H01L21/687 主分类号 H01L21/687
代理机构 代理人
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