发明名称 Improved Displacement Sensor
摘要 An apparatus and method for detecting multiple beams from a beamsplitter is disclosed. Some embodiments of the present invention are particularly well-suited for use in microphones, high-sensitivity pressure sensors, vibration sensors, and accelerometer applications. Some embodiments of the present invention generate a differential electrical output signal that is based on multiple detected optical signals. The differential output signal is generated in response to an environmental stimulus, such as a pressure differential or incident acoustic energy. In accordance with the illustrative embodiment, an optical displacement sensor redirects the transmitted beam back through the optically-resonant cavity with an angular offset. Due to the angular offset, the redirected beam (i.e., retransmitted beam) transits the cavity with an intra-cavity path length that corresponds to substantially full transmittance of the retransmitted beam in the absence of the environmental stimulus.
申请公布号 US2007279640(A1) 申请公布日期 2007.12.06
申请号 US20060421593 申请日期 2006.06.01
申请人 SYMPHONY ACOUSTICS, INC. 发明人 CARR DUSTIN WADE;HELM JAMES GILBERT
分类号 G01B9/02 主分类号 G01B9/02
代理机构 代理人
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