发明名称 PATTERN FORMING METHOD AND PATTERN FORMING APPARATUS
摘要 A pattern forming method for forming a pattern on a pattern forming material on a substrate by using an imprint pattern provided to a mold is constituted by preparing a substrate having thereon a pattern forming area, disposing the pattern forming material placed in an uncured state in the pattern forming area in a dispersion state at a plurality of positions at different intervals, and curing the pattern forming material in a state in which the pattern forming material is deformed in a shape corresponding to a shape of the imprint pattern provided to the mold.
申请公布号 US2007278712(A1) 申请公布日期 2007.12.06
申请号 US20070753106 申请日期 2007.05.24
申请人 CANON KABUSHIKI KAISHA 发明人 OKUSHIMA SHINGO;SEKI JUNICHI
分类号 B29C43/02;B29C71/00 主分类号 B29C43/02
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