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发明名称
VERFAHREN FÜR METAL-CMP MIT VERMINDERTER MULDENBILDUNG
摘要
申请公布号
DE60126758(T2)
申请公布日期
2007.12.06
申请号
DE20016026758T
申请日期
2001.05.10
申请人
INFINEON TECHNOLOGIES NORTH AMERICA CORP.
发明人
LIN, CHENTING;PLOESSL, ROBERT
分类号
H01L21/321;B24B;B24B7/24;B24B37/04;H01L21/302;H01L21/304;H01L21/461;H01L21/768
主分类号
H01L21/321
代理机构
代理人
主权项
地址
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