| 摘要 |
Optical waveguides (A) and (B) of a Mach-Zehnder modulator is normally formed on a -Z plane as an electric polarization non-inversion area. However, when the signal electrode 11 and the ground electrode 10 are provided asymmetrically on two waveguides, chirp occurs in output light, which is undesired. Therefore, these electrodes are provided symmetrically about the two waveguides. To effectively perform optical modulation, a part of the substrate in which an optical waveguide exists is to be electric polarization-inverted. As a result of the electric polarization inversion the optical waveguide is on the +Z plane. However, electric charge is accumulated on the +Z plane from unstable spontaneous electric polarization of an electric polarization inversion area, and has undesired influence on the performance of the optical modulator. Therefore, a conductive amorphous layer is formed on the surface of the electric polarization inversion area.
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