| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a work centering device which can perform the centering of a substrate while reducing damage to the device to the minimum. <P>SOLUTION: The work centering device is equipped with a tray 40 with a peripheral wall 41, a water supply section 46 feeding water into the tray 40 from a supply port 45 in the bottom center of the tray 40, a plate 50 which is disposed above the supply port 45 on the bottom face of the tray 40 apart from the bottom surface of the tray 40 so as to lead the water laterally into the tray 40 from the supply port 45 by making the water abutting on the plate, and at least three overflow ports 54 which are formed along the peripheral wall 41 of the tray 40 by notching the wall at intervals in its circumference so as to make the water in the tray 40 overflow laterally to the outside. <P>COPYRIGHT: (C)2008,JPO&INPIT |
