| 摘要 |
PROBLEM TO BE SOLVED: To provide a functionally-graded electroconductive thin film which has high electroconductivity, has improved interface characteristics, consumes low energy, and has a high function, for an electronic circuit operating at high switching speed/high frequency. SOLUTION: This apparatus for producing an electroconductive thin film comprises: a generation and supply section 102 which generates elements 103 composing the thin film such as charged particles; an energy control section 104 that has a function of controlling the kinetic energy of the emitted elements 103 composing the thin film 103 into a required range, and introduces the energy-controlled elements onto a substrate 105 which is a support for forming the objective electroconductive thin film thereon; and a magnetic field generation and application section 106 that can control a magnetic field parallel to a direction intersecting with a thickness direction of the electroconductive thin film into a required magnetic field strength and apply the magnetic field to the vicinity of the surface of the electroconductive thin film to be formed on the substrate 105. COPYRIGHT: (C)2008,JPO&INPIT
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