发明名称 |
COLORED NEGATIVE PHOTORESIST COMPOSITION, COLORED PATTERN COMPRISING THE SAME, AND METHOD FOR PRODUCING THE COLORED PATTERN |
摘要 |
<p>The present invention relates to a colored negative photoresist composition comprising a coloring agent (A), an alkali soluble binder polymer (B), a photopolymerizable compound (C), a photopolymerization initiator (D), and a solvent (E), wherein the alkali soluble binder polymer (B) is a polymer comprising the monomer represented by the following Formula 1 and a monomer having a carboxyl group. The colored negative photoresist composition of the present invention improves adhesion to a silicone wafer, in particular, an SiN wafer, to prevent a separation or tear in the lining, and to form a rectangular pattern, thereby being able to be effectively used in a complementary metal oxide semiconductor.</p> |
申请公布号 |
WO2007139312(A1) |
申请公布日期 |
2007.12.06 |
申请号 |
WO2007KR02539 |
申请日期 |
2007.05.25 |
申请人 |
DONGWOO FINE-CHEM. CO., LTD.;KIM, SEONG HYEON;LEE, SEUNG NO;KIM, SANG TAE |
发明人 |
KIM, SEONG HYEON;LEE, SEUNG NO;KIM, SANG TAE |
分类号 |
G03F7/004 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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