发明名称 COLORED NEGATIVE PHOTORESIST COMPOSITION, COLORED PATTERN COMPRISING THE SAME, AND METHOD FOR PRODUCING THE COLORED PATTERN
摘要 <p>The present invention relates to a colored negative photoresist composition comprising a coloring agent (A), an alkali soluble binder polymer (B), a photopolymerizable compound (C), a photopolymerization initiator (D), and a solvent (E), wherein the alkali soluble binder polymer (B) is a polymer comprising the monomer represented by the following Formula 1 and a monomer having a carboxyl group. The colored negative photoresist composition of the present invention improves adhesion to a silicone wafer, in particular, an SiN wafer, to prevent a separation or tear in the lining, and to form a rectangular pattern, thereby being able to be effectively used in a complementary metal oxide semiconductor.</p>
申请公布号 WO2007139312(A1) 申请公布日期 2007.12.06
申请号 WO2007KR02539 申请日期 2007.05.25
申请人 DONGWOO FINE-CHEM. CO., LTD.;KIM, SEONG HYEON;LEE, SEUNG NO;KIM, SANG TAE 发明人 KIM, SEONG HYEON;LEE, SEUNG NO;KIM, SANG TAE
分类号 G03F7/004 主分类号 G03F7/004
代理机构 代理人
主权项
地址