| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspecting device capable of discriminating its operation state itself by utilizing a constitution for inspecting an inspection target. SOLUTION: In the surface inspecting device 1, equipped with a detection unit 5 which irradiates the inspection target 100 with an inspection light from the outer periphery of an axially extending inspection head 16 and receives the reflected light from the inspection target 100 via the inspection head 16 to output the signal corresponding to the quantity of the reflected light, a linear drive mechanism 30 for moving the inspection head 16 in an axial line direction and a rotary drive mechanism 30 for making the inspection head 16 rotate about an axial line, a sample piece 37 having a through-hole 37a for permitting the inspection head 16 pass is arranged on the moving route in the axial line direction of the inspection head 16. The operating state of the inspection target 100 is discriminated on the basis of the output signal of the detection unit 5 emitted, when the inner peripheral surface of the sample piece 37 is scanned by the inspection light, by moving the inspection head 16 in the axial line direction, while rotating the same around the axial direction. COPYRIGHT: (C)2008,JPO&INPIT
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