| 发明名称 |
Method for increasing the productivity of loading vacuum coating installations comprises removing a treatment unit from a treatment section and inserting a treatment unit into the treatment section while maintaining the process vacuum |
| 摘要 |
<p>Method for increasing the productivity of loading vacuum coating installations comprises removing a treatment unit (12) from a treatment section (1) and inserting a treatment unit into the treatment section so that the process vacuum is maintained in the treatment section. An independent claim is also included for a sluice chamber (3) for exchanging treatment units in a vacuum coating installation.</p> |
| 申请公布号 |
DE102006026317(A1) |
申请公布日期 |
2007.12.06 |
| 申请号 |
DE20061026317 |
申请日期 |
2006.06.02 |
| 申请人 |
VON ARDENNE ANLAGENTECHNIK GMBH |
发明人 |
LEUPOLD, JAN;GOTTSMANN, LUTZ;GROSER, GOETZ |
| 分类号 |
C23C14/56 |
主分类号 |
C23C14/56 |
| 代理机构 |
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代理人 |
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| 主权项 |
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