| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple and inexpensive XY stage capable of positioning two dimensions even if employing only one driving source, e.g., one motor. SOLUTION: An X direction guide mechanism 10 is disposed at a table 2, and a movable table 3 is guided along the X direction by the X direction guide mechanism 10. The movable table 3 is driven along the X direction by a driving mechanism 30. A movable body 5 is mounted on the movable table 3, and the movable body 5 is guided along the Y direction by a Y direction guide mechanism 20. A changing plate 40 and a changing plate 42 are fixed to the table 2, and a tilt surface 41 of the changing plate 40 and a tilt surface 43 of the changing plate 42 are tilted with respect to the X direction and the Y direction, such that the tilt surface 41 faces the tilt surface 43. When the movable table 3 is moved toward the plus side in the +X direction under such the state that the movable body 5 is in contact with the tilt surface 41, the movable body 5 is moved toward the minus side in the -Y direction. When the movable table 3 is moved toward the minus side in the -X direction under such the state that the movable body 5 is in contact with the tilt surface 43, the movable body 5 is moved toward the plus side in the +Y direction. COPYRIGHT: (C)2008,JPO&INPIT |
