| 摘要 |
PROBLEM TO BE SOLVED: To allow a retainer for retaining an object P on a light transmissive stage 1 to have a function to heat the object P without damaging the light transmissive property of the stage 1. SOLUTION: A transparent conductive film 3 is disposed on a face on the opposite side of a mounting face of the stage 1, and the transparent conductive film 3 is used as a heater. COPYRIGHT: (C)2008,JPO&INPIT
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