发明名称 Method of Molding Silica Glass
摘要 A method of molding a silica glass comprises: a first step of accommodating the silica glass containing OH groups in a concentration of 900 ppm to 1300 ppm by mass in a hollow portion of a mold provided with a press portion; a second step of molding the silica glass in a predetermined form by pressing the same by means of the pressing portion so that a maximum pressure can be 0.2 Kg/cm<SUP>2 </SUP>to 0.8 Kg/cm<SUP>2 </SUP>while heating the silica glass so that the temperature of the same can be within a hold temperature range of 1530° C. to 1630° C.; and a third step of cooling the molded silica glass.
申请公布号 US2007271958(A1) 申请公布日期 2007.11.29
申请号 US20050631310 申请日期 2005.06.29
申请人 NIKON CORPORATION 发明人 ABE TETSUYA;YAJIMA SHOUJI
分类号 C03B32/00;C03B5/00;C03B7/14;C03B11/00;C03B20/00;G03F1/60;H01L21/027 主分类号 C03B32/00
代理机构 代理人
主权项
地址