发明名称 Apparatus and method for measuring widthwise ejection uniformity of slit nozzle
摘要 An apparatus for measuring withwise ejection uniformity of a slit nozzle comprises a plurality of oil pressure measuring units that are arranged in parallel in a widthwise direction of the slit nozzle so as to measure ejection pressure of fluid to be ejected from an ejection port of the slit nozzle, each oil pressure measuring unit having an oil-pressure detection surface facing the ejection port of the slit nozzle; and a control unit that measures ejection pressure applied to the oil pressure measuring unit so as to calculate the uniformity to display.
申请公布号 US2007275157(A1) 申请公布日期 2007.11.29
申请号 US20070798867 申请日期 2007.05.17
申请人 K.C. TECH CO., LTD. 发明人 CHO KANG II
分类号 C23C16/52;B05C11/00 主分类号 C23C16/52
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