发明名称 |
METHOD AND SYSTEM FOR PERPENDICULAR MAGNETIC MEDIA METROLOGY |
摘要 |
PROBLEM TO BE SOLVED: To provide a system of magnetic write and read heads suitable for the measurement of magnetic properties of magnetic thin films with a perpendicularly oriented magnetic recording layer. SOLUTION: The system has a macroscopic recording head communicating with a computer. The recording head has a yoke and at least one magnetic field generating element for generating a magnetic field. The yoke has a first magnetic pole capable of being positioned above a first side of a device having a magnetic recording medium layer and a second magnetic pole capable of being positioned facing the first magnetic pole and below a second side of the device, and positions the first and second magnetic poles providing enclosure of magnetic flux passing through the device. The system is capable of positioning and movement of the device and the yoke relative to each other, and has a transport mechanism capable of communicating with the device and with the macroscopic recording head. COPYRIGHT: (C)2008,JPO&INPIT
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申请公布号 |
JP2007305291(A) |
申请公布日期 |
2007.11.22 |
申请号 |
JP20070125438 |
申请日期 |
2007.05.10 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORP |
发明人 |
VAN DRENT WILLIAM;VAJDA FERENC |
分类号 |
G11B5/84;G11B5/00;G11B5/82 |
主分类号 |
G11B5/84 |
代理机构 |
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地址 |
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