| 摘要 |
PROBLEM TO BE SOLVED: To provide a boring method for highly precisely forming a bore in a substrate made of a quartz or a glass, and a method for manufacturing a nozzle for a liquid delivering apparatus using the boring method. SOLUTION: A processing process comprising a process for forming a masking film on the surface of the substrate, a process for forming a resist film by sticking a dry film resist on the surface of the masking film, a process for patterning the resist film into a specified shape, a process for patterning the masking film into a specified shape, a process for etching the surface of the substrate by dry etching, a process for removing the masking film remaining on the surface of the substrate after dry etching, are repeated for a plurality of times. COPYRIGHT: (C)2008,JPO&INPIT
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