| 摘要 |
PROBLEM TO BE SOLVED: To provide a differential pumping scanning electron microscope capable of easily carrying out maintenance and inspection of various parts of an electron-optical system and a differential pumping orifice easily making spin finishing of a pipe. SOLUTION: The differential pumping scanning electron microscope connects an electron gun chamber 1 provided with an electron source generating electron beams, and a sample chamber 2 arranging a sample in it with a mirror cylinder part 7, which is provided with an inner pipe 14 for the electron beams to pass inside, condenser lenses 8, 13 at least as focusing means of the electron beams from the electron gun chamber 1, and an objective lens 9 focusing on the sample in the sample chamber 2. The inner pipe 14 is formed in an integral length from the electron gun chamber 1 up to the sample chamber 2, and at the same time, has an objective aperture unit 16 serving as the differential pumping orifice mounted at a tip part located at a side of the sample chamber 2. A liner tube 15 to be a condenser aperture unit is mounted on the inner pipe 14 toward the electron gun chamber 1. COPYRIGHT: (C)2008,JPO&INPIT
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