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发明名称
Procédé de mesure de l'épaisseur de couches minces interférentielles
摘要
申请公布号
FR81843(E)
申请公布日期
1963.11.15
申请号
FR19620902521
申请日期
1962.06.29
申请人
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
发明人
LOSTIS PIERRE
分类号
C23C14/54;G01B7/06
主分类号
C23C14/54
代理机构
代理人
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