发明名称 |
Method of forming a microlens array having a high fill factor |
摘要 |
A method of forming a microlens array includes preparing a substrate; fabricating a photosensitive array on the substrate; depositing a layer of lens material on the photosensitive array; depositing and patterning photoresist on the lens material, wherein patterning includes forming a photoresist region having a solid curved upper surface and a substantially rectangular base on the lens material layer; developing the photoresist; reflowing the photoresist; and processing the lens material for form a microlens array.
|
申请公布号 |
US7297473(B2) |
申请公布日期 |
2007.11.20 |
申请号 |
US20050270701 |
申请日期 |
2005.11.08 |
申请人 |
SHARP LABORATORIES OF AMERICA, INC. |
发明人 |
ONO YOSHI;ULRICH BRUCE D. |
分类号 |
G02B3/00 |
主分类号 |
G02B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|