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发明名称
MAGNETRON-SPUTTERVORRICHTUNG
摘要
申请公布号
DE60222799(D1)
申请公布日期
2007.11.15
申请号
DE20026022799
申请日期
2002.11.07
申请人
MONAGHAN, DERMOT PATRICK;BELLIDO-GONZALEZ, VICTOR
发明人
MONAGHAN, DERMOT PATRICK;BELLIDO-GONZALEZ, VICTOR
分类号
C23C14/34;H01J37/34;C23C14/35;H01J37/32
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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