发明名称 SEM TEST APPARATUS
摘要 <p>Test apparatus for examining the operation and functioning of ultra-small resonant structures, and specifically using an SEM as the testing device and its electron beam as an exciting source of charged particles to cause the ultra-small resonant structures to resonate and produce EMR.</p>
申请公布号 WO2007130085(A1) 申请公布日期 2007.11.15
申请号 WO2006US22767 申请日期 2006.06.12
申请人 VIRGIN ISLANDS MICROSYSTEMS, INC. 发明人 GORRELL, JONATHAN;DAVIDSON, MARK;TOKARZ, JEAN
分类号 G01N23/00 主分类号 G01N23/00
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