LASER MIT AUTOMATISIERTER STEUERUNG DER STRAHLQUALITÄT,申请号AT20000102800T-传众专利搜索

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发明名称	LASER MIT AUTOMATISIERTER STEUERUNG DER STRAHLQUALITÄT
摘要
申请公布号	AT376710(T)	申请公布日期	2007.11.15
申请号	AT20000102800T	申请日期	2000.02.10
申请人	CYMER, INC.	发明人	ERIE, FREDERIC G.;BUCK, JESSE D.;DAS, PALASH P.
分类号	H01L21/027;H01S3/13;G02B5/18;G03F7/20;H01S3/08;H01S3/1055;H01S3/134;H01S3/139;H01S3/225	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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