| 摘要 |
PROBLEM TO BE SOLVED: To prevent sensitivity from getting worse with a distortion caused by solution pressure, in a quartz oscillator with a thinned quartz substrate for a high frequency wave. SOLUTION: A diaphragm part 2A is formed in a sealing gas introducing portion, in a support substrate 2 for bonding the quartz oscillator 1, and the diaphragm part is distorted to a sealing gas introducing part side by the solution pressure received when immersing the sealing gas introducing portion into a solution, so as to reduce the distortion of the quartz substrate to the sealing gas introducing part side. A distortion amount of the quartz substrate is detected by a strain gage attached to the sealing gas introducing part side to correct a measured value of the quartz oscillator. COPYRIGHT: (C)2008,JPO&INPIT
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