发明名称 |
Microcontact printing |
摘要 |
A microcontact printing tool having a print unit including a stamp head with a stamp and a wafer chuck for retaining a substrate. The stamp contained by the stamped head movable relative to the substrate by an actuator and a stage. A plurality of sensors detect the position of the stamp relative to substrate. A method of using the printing tool that includes a real-time feedback for consistent and accurate application of force during the printing of the substrate. The stamp head includes a pressure chamber carrying the stamp. The stamp backing is deflected prior to contact of the stamp with the substrate to form a minimum point and the stamp backing and the stamp is returned to a plane to create a printing propagation contact. An apparatus has a master backing and a stamping backing in close proximity and the stamp material drawn in through a vacuum. The stamp is separated from the master by use of a parting fluid.
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申请公布号 |
US2007261574(A1) |
申请公布日期 |
2007.11.15 |
申请号 |
US20060506009 |
申请日期 |
2006.08.17 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
KENDALE AMAR M.;TRUMPER DAVID L. |
分类号 |
B41F19/02;B29C33/10;B41F17/00;B41M1/02;G03F7/00;G03F9/00;H01L21/00;H01L21/68 |
主分类号 |
B41F19/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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