| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a washing apparatus in which the washing to remove and discharge foreign substance is efficiently performed without increasing the pressure of a washing liquid pressurized for jet cleaning or the cleaning time or the like. <P>SOLUTION: In the washing apparatus provided with a nozzle part 31 in which a plurality of jetting ports 311 for jetting the washing liquid to a member 8 to be cleaned are arranged and a driving means M for driving at least one of the member 8 to be washed and the nozzle part 31 to relatively move the nozzle part 31 along a washing object 81 of the member 8 to be cleaned, the nozzle part 31 is provided with a passage 312 which has a supply hole 313 for introducing the washing liquid to a plurality of jetting ports 311 and nearly crossing the jetting port 311 axis and is for guiding the flow of the washing liquid form the supply hole 313 to the jetting ports 311. <P>COPYRIGHT: (C)2004,JPO</p> |
