MINUTE STRUCTURE INSPECTION DEVICE, MINUTE STRUCTURE INSPECTION METHOD, AND MINUTE STRUCTURE INSPECTION PROGRAM

摘要

A speaker unit (2) has a plurality of sound sources each outputting a sound wave. The compressional, sound wave output from the speaker unit (2) arrives, or vibrates air, which moves a movable part of a three-axis acceleration sensor, or a microstructure of a chip to be tested TP. As the movable part thus moves, a value in resistance accordingly varies, and such variation is measured as based on an output voltage provided via a probe (4). A control unit (20) determines a property of the three-axis acceleration sensor from a value in property as measured or measurement data. Furthermore, the plurality of sound sources can be spaced by a pitch of a predetermined value set as based on their difference in the distance to the movable part of the three-axis acceleration sensor and the wavelength of the test wave to apply a composite test wave to the movable part such that the composite sound wave's composite sound field is maximized.