发明名称 METHOD AND APPARATUS OF ETCHING MANUFACTURING PROCESS OF PANEL
摘要 PROBLEM TO BE SOLVED: To provide a method and an apparatus for etching manufacturing processes of a panel. SOLUTION: In the method and the apparatus for the etching manufacturing processes of a panel, the panel is installed in a sealed work tank while the panel is being erected vertically. The panel is etched with an etching liquid spray for spraying spirally, above the panel. Atomizing the etching liquid results in a spiral spray air current, thus spraying the etching liquid to the entire surface to be etched uniformly. The unification of etching is accelerated and the spraying is utilized to a fresh etching liquid onto the etching surface continuously, thus increasing etching speed. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007294606(A) 申请公布日期 2007.11.08
申请号 JP20060119544 申请日期 2006.04.24
申请人 ETSUJO KAGI KOFUN YUGENKOSHI 发明人 CHEN CHUEN-SHIA
分类号 H01L21/306;C23F1/08;C23F1/46 主分类号 H01L21/306
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