| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a Y axis central drive means which can perform movement control of a Y stage well. <P>SOLUTION: A Y axis central drive means 15C provided on an Y stage 11 is provided with a stator 152 formed of a plurality of magnets in columnar shape, and a stator supporting member 151 for supporting one and the other longitudinal ends and the side face of the stator 152 from the side of one direction. A moving element 153 formed in tubular shape having C-shaped cross-section by bending a coil is provided to cover the side face of the stator 152 through a clearance from the stator 152. Consequently bending of the stator 152 can be suppressed through support by the stator supporting member 151 and generation of vibration incident to movement of the moving element 153 can be suppressed. Furthermore, since the moving element 153 is formed in tubular shape having C-shaped cross-section, the moving element 153 can be moved from one end to the other end of the stator 152 without touching the stator supporting member 151. <P>COPYRIGHT: (C)2008,JPO&INPIT |
