摘要 |
<P>PROBLEM TO BE SOLVED: To provide a process by which thick platings such as bumps and wirings are produced with high precision while a resist shows high swelling resistance to a plating solution and the plating solution is prevented from leaking in between the pattern and substrate, a radiation-sensitive negative resin composition which shows sensitivity suitable for the production process and possesses excellent resolution and heat resistance, and a transfer film including the composition. <P>SOLUTION: The radiation-sensitive negative resin composition contains (A) a polymer including a structural unit represented by formula (1) and a structural unit represented by formula (2); (B) a compound having one ethylenically unsaturated double bond; and (C) a radiation-sensitive radical polymerization initiator. <P>COPYRIGHT: (C)2008,JPO&INPIT |