| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a BAW resonator capable of improving the mechanical quality factor and the electromechanical coupling factor. <P>SOLUTION: The BAW resonator includes a base substrate 10, a lower electrode 20 formed on one surface of the base substrate 10, a piezoelectric conversion part 30 comprising a piezoelectric film formed on the lower electrode 20, and an upper electrode 40 formed on the side opposite to the side of the lower electrode 20 in the piezoelectric conversion part 30. The base substrate 10 is constituted of a silicon substrate 11 and an acoustic multilayered film 12. The piezoelectric conversion part 30 has a plurality of piezoelectric conversion element parts 30a, separated within a plane orthogonal to a perpendicular direction of the lower electrode 20. The piezoelectric conversion element parts 30a of the piezoelectric conversion part 30 are formed like columns, of which the lengthwise direction coincides with the perpendicular direction of the lower electrode 20 and are arranged like a two-dimensional array on the lower electrode 20. <P>COPYRIGHT: (C)2008,JPO&INPIT |
