发明名称 |
SUBSTRATE CLEANING APPARATUS AND METHOD |
摘要 |
A cleaning apparatus to remove organic substances deposited onto a substrate, the apparatus includes a transport unit configured to transport the substrate, a water steam ejection unit configured to eject a heated water steam to a face of the substrate to be transported deposited with the organic substances, and a physical force applying unit configured to apply a physical force to the organic substances deposited onto the substrate to be transported.
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申请公布号 |
US2007256711(A1) |
申请公布日期 |
2007.11.08 |
申请号 |
US20070683582 |
申请日期 |
2007.03.08 |
申请人 |
HAYASHI TOSHIHIDE;MAKINO TSUTOMU;WAKATSUKI TAKAHIKO;HAYAMIZU NAOYA;FUJITA HIROSHI;SAITO AKIKO |
发明人 |
HAYASHI TOSHIHIDE;MAKINO TSUTOMU;WAKATSUKI TAKAHIKO;HAYAMIZU NAOYA;FUJITA HIROSHI;SAITO AKIKO |
分类号 |
B08B3/00 |
主分类号 |
B08B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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