发明名称 Method for manufacturing photosensitive resin composition
摘要 <p>A method for manufacturing a positive photosensitive resin composition, the method comprising: filtering a composition having a concentration of solids content of 30 mass% or more through a hollow fiber filter having a pore size of 0.1 µm or less, wherein the composition comprises: (A) resin; (B) a photosensitizer; and (C) a solvent, and a relief pattern formed with the photosensitive resin composition.</p>
申请公布号 EP1852743(A1) 申请公布日期 2007.11.07
申请号 EP20070008675 申请日期 2007.04.27
申请人 FUJIFILM CORPORATION 发明人 YAMANAKA, TSUKASA
分类号 G03F7/023 主分类号 G03F7/023
代理机构 代理人
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