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经营范围
发明名称
Multi-purpose processing chamber with removable chamber liner
摘要
申请公布号
EP1170777(B1)
申请公布日期
2007.11.07
申请号
EP20010116404
申请日期
2001.07.06
申请人
APPLIED MATERIALS, INC.
发明人
MOHN, JONATHAN D.;HELMSEN, JOHN J.;BARNES, MICHAEL
分类号
H01J37/32;H01L21/302;H01L21/205;H01L21/3065
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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